Pressemitteilung von Martin Busch

SURAGUS to perform live measurement at SEMICON Europe

06.10.2015

Wissenschaft, Forschung & Technik

SURAGUS is demonstrating a non-contact live measurement of non-contact wafer sheet resistance at the SEMICON Europe 2015. The wafer will be moved during cluster processing through a sheet resistance measuring station. The applied wafer handling system is a new development by specialist Adenso. The measured sheet resistance single-point or line scan solution provides high accuracy and sample rate for in- and ex-vacuo applications.
The SEMICON Europe is the leading trade fair for the semiconductor industry, plastic electronics and photovoltaics, 06 - 08 October in Dresden.
Meet SURAGUS at Silicon Saxony booth 2046.

sheet resistance measuring non-contact wafer sheet resistance SEMICON Europe 2015 SURAGUS NDT semiconductor industry plastic electronics

http://www.suragus.com
SURAGUS
Maria-Reiche-Straße 1 01109 Dresden

Pressekontakt
http://www.suragus.com
SURAGUS GmbH
Maria-Reiche-Straße 1 01109 Dresden

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